个人简述:

获陕西省科学技术一等奖2项，中国机械工业科学技术一等奖1项

科研工作:

研究方向为微机电系统（MEMS），主要从事微传感器技术、微机械加工与封装技术等领域的研究工作。 1.Sen Ren, Weizheng Yuan, Xiaodong Sun, Jinjun Deng, Dayong Qiao, Chengyu Jiang. Microfabricated SOI pressure sensor using dynamically balanced lateral resonator[C]. Proceedings of the 9th IEEE international conference on nano/micro engineered and molecular systems (IEEE-NEMS 2014), Hawaii, USA, April 13-16, 2014. ( EI收录)2.Sen Ren, Weizheng Yuan, Dayong Qiao, Jinjun Deng, Xiaodong Sun. A micromachined pressure sensor with integrated resonator operating at atmospheric pressure[J]. Sensors, 2013, 13(12): 17006-17024. (SCI收录) 3.苑伟政, 任森, 邓进军, 乔大勇. 硅微机械谐振压力传感器技术发展[J]. 机械工程学报, 2013, 49(20): 2-9. (EI收录)